New planar XY structure delivers 500 × 500 mm journey and a pair of g acceleration, with sooner settling and room to combine extra movement axes and buyer tools
PI (Physik Instrumente) L.P., a number one supplier of precision movement management and nanopositioning options, right this moment introduced the A-323, a planar air bearing scanner for semiconductor inspection, metrology and photonics functions that demand excessive throughput. Designed and manufactured within the USA, the A-323 builds on the corporate’s A-322 planar scanner with a brand new structure that improves precision and repeatability, allows greater acceleration and shortens step-and-settle occasions.
In its fundamental configuration, the A-323 gives 500 × 500 mm of XY journey at speeds as much as 2 m/s and a pair of g acceleration. Specified accuracy is 0.1 µm, with pitch and yaw efficiency of 10 µrad and a pair of µrad, respectively.
Decrease Middle of Gravity, Higher Dynamics
The A-323 makes use of a split-beam cross-axis design that locations the payload decrease and nearer to the motor power aircraft. This reduces pitching and rocking throughout acceleration and shrinks the Abbe offset between the payload and the encoder measurement aircraft, limiting positioning errors brought on by angular movement. A gantry configuration improves yaw management throughout the working space.
Drive and encoder factors sit farther aside than on the A-322 Extremely, which provides extra leverage over rotation concerning the vertical axis. This issues on the fringe of a 300 mm wafer, the place even a small yaw deviation produces a bigger linear error than it does close to the middle.
Quicker Settling By Response-Power Administration
Fast strikes can introduce vibration that delays measurement. The A-323 redirects motor response forces into the machine body reasonably than the granite base. That reduces disturbances to the stage and to optics, cameras and sensors mounted on the granite bridge. The result’s a extra secure relationship between workpiece and measurement tools throughout acceleration, settling and the transition to constant-velocity scanning.
Configurable for Actual-World Methods
A central pocket holds application-specific movement modules, together with PI’s A-523 Z-tip/tilt stage, a compact 5 mm Z-stage, a rotary axis, or mixed rotary/Z/tilt modules. Conserving these axes low preserves the platform’s dynamic benefits.
Newly developed air-bearing pucks present a stiffer air movie, and opposing bearings preserve the magnetic preload throughout aggressive strikes. Built-in cable tracks, pneumatic routing and cooling provisions simplify set up of customer-provided tools, and symmetrical cable loops assist restrict position-dependent disturbances.
Room to Scale
The A-323 has demonstrated acceleration as much as 2 g. At that degree, efficiency is restricted primarily by motor peak power, sustained RMS power and thermal loading reasonably than by the stage construction. Liquid-cooled motors handle warmth, and motor sizing and cooling will be matched to payload and obligation cycle. The structure can accommodate bigger motors the place higher sustained efficiency is required. Ultimate efficiency will depend on the built-in payload, chosen movement modules, motor configuration and working circumstances.
Availability and Extra Info
To debate scanning necessities, payload configuration, extra movement axes or system integration, contact PI’s engineering workforce. Watch the A-323 video in high-speed scanning movement.
Purposes and Industries Served
Semiconductor take a look at and manufacture, wafer stealth slicing, optical metrology, photonics alignment, materials analysis, laser processing
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